Single and mechanically coupled capacitive silicon nanomechanical resonators

Micro & nano letters

article

Nguyen Van Toan¹  Tsuyoshi Shimazaki²  Takahito Ono² 

[1] Microsystem Integration Center (μSIC), Tohoku University;Graduate School of Engineering, Tohoku University

关键词: silicon;    elemental semiconductors;    micromechanical resonators;    nanoelectromechanical devices;    nanofabrication;    silicon-on-insulator;    vibrations;    finite element analysis;    frequency response;    mechanically coupled capacitive silicon nanomechanical resonators;    single coupled capacitive silicon nanomechanical resonators;    silicon on insulator wafer;    Tempax glass substrate;    anodic bonding;    finite element method simulation;    vibration modes;    single beam resonator;    nonlinear response;    frequency response amplitude;    mechanical resonance;    size 21.3 mum;    size 500 nm;    size 5 mum;    size 300 nm;    resistance 1.2 kohm;    Si;   

DOI  :  10.1049/mnl.2016.0265

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Laparoscopic surgical techniques have expanded tremendously within the last two decades and increasingly being used to treat intraperitoneal pathology. These minimally invasive techniques offer decreased operating time, decreased morbidity and decreased length of hospital stay. These procedures, however, are not completely safe and without potential morbidity. Massive and life threatening extraperitoneal pneumodissection after laparoscopic procedures is one of the uncommon complications associated with it. Here we describe a case of massive subcutaneous emphysema with prolonged hypercarbia.

【 授权许可】

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