Wafer-level vacuum-encapsulated silicon resonators with arc-welded electrodes

Micro & nano letters

article

George Xereas¹  Vamsy P. Chodavarapu² 

[1] Department of Electrical and Computer Engineering, McGill University;Department of Electrical and Computer Engineering, Kettering Laboratories, University of Dayton

关键词: micromechanical resonators;    microelectrodes;    arc welding;    encapsulation;    vacuum techniques;    silicon;    elemental semiconductors;    microfabrication;    microsensors;    wafer level packaging;    wafer-level vacuum-encapsulated silicon resonators;    arc-welded electrodes;    deep sub-micron transduction gaps;    microelectromechanical systems integrated design for inertial sensor process;    MIDIS process;    commercial pure-play MEMS process;    prototype Lamé mode resonators;    quality factor;    vacuum cavity;    motional resistance;    pressure 10 mtorr;    frequency 6.89 MHz;    Si;   

DOI  :  10.1049/mnl.2017.0270

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Malignant involvement of the lung can be primary or metastatic. Although primary lung cancer may be endobronchial, parenchymal or both, metastases to the lung are generally parenchymal. However, less commonly, they may be endobronchial. The lungs are the most common site of metastases among all the malignancies. Common extrapulmonary malignancies causing endobronchial metastases (EBMs) are breast, colorectal and kidney. EBMs from uterine cervical cancer are very rare. Although there are a few case reports in the medical literature describing EBM from cervical cancer, none are from adenocarcinoma histology. In this study, we report a case of EBM which on histopathological examination and immunohistochemistry were found to be from a prior adenocarcinoma cervix. Differentiating EBM from bronchogenic carcinoma and other more common extrapulmonary solid organ malignancies may present a clinico-pathological and radiological challenge.

【 授权许可】

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