Fabrication and characterisation of microscale hemispherical shell resonator with diamond electrodes on the Si substrate

Micro & nano letters

article

Zhaoyang Liu¹  Weiping Zhang¹  Feng Cui¹  Jian Tang¹  Yuying Zhang¹ 

[1] National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University;Key Laboratory of Thin Film and Microfabrication Technology (Ministry of Education), Shanghai Jiao Tong University;Shanghai Key Laboratory of Navigation and Location-based Services, Shanghai Jiao Tong University;Department of Micro-Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

关键词: microfabrication;    silicon;    elemental semiconductors;    damping;    electrodes;    boron;    gyroscopes;    microsensors;    diamond;    surface roughness;    moulding;    capacitive sensors;    mode matching;    micromechanical resonators;    Si substrate;    integrated diamond electrodes;    silicon substrate;    three-dimensional microstructure hemispherical shell;    mode matching;    microhemispherical resonator;    integrated electrostatic excitation;    capacitive detection transducers;    Boron-doped polycrystalline diamond;    integrated electrodes;    fabrication process;    self-aligned fabrication method;    millimetre-scale 3D hemispherical shell resonator;    degenerate modes;    full-symmetric microscale hemispherical resonator gyroscopes;    hemisphere mould;    thermo-elastic damping;    size 0.8 mm;    size 3.0 nm;    frequency 81.3 kHz;    size 2.0 mum;    Si;   

DOI  :  10.1049/mnl.2018.5601

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

A self-aligned fabrication method is employed for microscale hemispherical shell resonator with integrated diamond electrodes on a silicon (Si) substrate. The millimetre-scale three-dimensional (3D) hemispherical shell resonator, with integrated electrostatic excitation and capacitive detection transducers for full control of the resonator, is fabricated on the Si substrate by employing a microelectromechanical systems process. The eight integrated diamond electrodes evenly distributed outside the hemispherical shell are fabricated using a self-aligned method, which ensures uniform capacitive gap along the whole circumference. The Boron-doped polycrystalline diamond, a material with low thermo-elastic damping and low surface losses to reach the high quality, is used as the millimetre-scale 3D hemispherical shell resonator with integrated electrodes. The fabrication process enables the production of almost perfect hemisphere mould (<2% roundness variation) with an average surface roughness of 3 nm. Vibration modes and frequencies are carried out by a scanning laser Doppler vibrometer; the elliptical mode frequency is determined to be at 81.3 kHz, with the two M = 2 degenerate modes having a relative frequency mismatch of 0.86%. This process can be further optimised to fabricate high-quality and full-symmetric microscale hemispherical resonator gyroscopes in batch.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND