Monitoring of hydrogen concentration using capacitive nanosensor in a 1% H 2 –N 2 mixture

Micro & nano letters

article

Ghobad Behzadi Pour¹  Leila Fekri Aval¹ 

[1] Department of Physics, East Tehran Branch, Islamic Azad University

关键词: hydrogen;    gas sensors;    capacitive sensors;    nanosensors;    palladium;    nanoparticles;    electrochemical electrodes;    MIS structures;    spin coating;    transmission electron microscopy;    ultraviolet spectra;    surface morphology;    atomic force microscopy;    hydrogen concentration;    capacitive nanosensor;    palladium nanoparticles electrode;    metal–oxide–semiconductor structure;    n-type silicon substrate;    oxide film thickness;    spin coating;    transmission electron microscope;    UV spectrum;    atomic force microscope;    response time;    recovery time;    time interval;    temperature 293 K to 298 K;    H2-N2;    Pd;    Si;   

DOI  :  10.1049/mnl.2017.0586

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

In this work, a hydrogen capacitor nanosensor with palladium nanoparticles (PdNPs) electrode based on metal–oxide–semiconductor structure has been fabricated. The capacitor sensor has been fabricated on the n-type silicon substrate with an oxide film thickness of 50 nm. PdNPs are synthesised and then deposited on the oxide surface using spin coating. PdNPs are characterised using by transmission electron microscope and UV spectrum. Also, the morphology of the oxide surface is characterised using by atomic force microscope. The response time and recovery time of nanosensor have been explained at the room temperature. The time interval to 90% of the signal value for 1% H2–N2 mixture was 1.4 s and recovery time was 14 s. The curve of pressure as a function of hydrogen concentration (H/Pd) in the PdNPs and the mechanism of the nanosensor are reported. The capacitor nanosensor based on nanoparticles shows sensitive and fast response.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND