Glass Difractive Optical Elements (DOEs) with complex modulation DLC thin film coated

Materials Research

Marina Sparvoli¹  Ronaldo Domingues Mansano¹ 

[1] ,Universidade de São Paulo Escola Politécnica Departamento de Engenharia de Sistemas EletrônicosSão Paulo SP ,Brazil

关键词: diamond like carbon;    glass;    diffractive optical elements;   

DOI  :  10.1590/S1516-14392008000300018

来源: SciELO

【 摘 要 】

We developed a complex (amplitude and phase) modulation Diffractive Optical Element (DOE) with four phase levels, which is based in a glass substrate coated with DLC (Diamond Like Carbon) thin film as the amplitude modulator. The DLC film was deposited by magnetron reactive sputtering with a graphite target and methane gas in an optical glass surface. The glass and DLC film roughness were measured using non destructive methods, such as a high step meter, Atomic Force Microscopy and Diffuse Reflectance. Other properties, such as refractive index of both materials were measured. The DOEs were tested using 632.8 nm HeNe laser.

【 授权许可】

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