Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films

Journal of the Brazilian Chemical Society

Éder C. Oliveira¹  Sandra A. Cruz¹  Paulo H. L. Aguiar¹ 

[1] ,Universidade Federal do ABC Centro de Engenharia, Modelagem e Ciências Sociais Aplicadas Santo André SP ,Brazil

关键词: amorphous hydrogenated carbon;    PECVD;    parameters;    diamond like carbon;    polymer like carbon;   

DOI  :  10.1590/S0103-50532012005000027

来源: SciELO

【 摘 要 】

Hydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.

【 授权许可】

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