Fabrication and Performance of a Photonic-Microfluidic Integrated Device

Micromachines

Benjamin R. Watts²  Thomas Kowpak¹  Zhiyi Zhang³  Chang-Qing Xu²  Shiping Zhu¹  Xudong Cao⁴ 

[1] Department of Chemical Engineering, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada;Department of Engineering Physics, McMaster University, 1280 Main Street West, Hamilton, ON L8S 4L7, Canada;;Institute of Microstructural Science, National Research Council of Canada, 1200 Montreal Road, Ottawa, ON K1A 0R6, CanadaDepartment of Chemical and Biological Engineering, University of Ottawa, 550 Cumberland Street, Ottawa, ON K1N 6N5, Canada;

关键词: SU-8;    PDMS;    microfluidics;    optical waveguide;    integration;    devices;   

DOI  :  10.3390/mi3010062

来源: mdpi

【 摘 要 】

Fabrication and performance of a functional photonic-microfluidic flow cytometer is demonstrated. The devices are fabricated on a Pyrex substrate by photolithographically patterning the microchannels and optics in a SU-8 layer that is sealed via a poly(dimethylsiloxane) (PDMS) layer through a unique chemical bonding method. The resulting devices eliminate the free-space excitation optics through integration of microlenses onto the chip to mimic conventional cytometry excitation. Devices with beam waists of 6 μm and 12 μm in fluorescent detection and counting tests using 2.5 and 6 μm beads-show CVs of 9%–13% and 23% for the two devices, respectively. These results are within the expectations for a conventional cytometer (5%–15%) and demonstrate the ability to integrate the photonic components for excitation onto the chip and the ability to maintain the level of reliable detection.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.