SU-8 as a Material for Microfabricated Particle Physics Detectors

Micromachines

Pietro Maoddi¹  Alessandro Mapelli¹  Sebastien Jiguet² 

[1] Physics Department, European Organization for Nuclear Research (CERN), CH-1211 Geneva 23, Switzerland; E-Mail:;Gersteltec Sàrl, General-Guisan 26, CH-1009 Pully, Switzerland; E-Mail:

关键词: SU-8;    particle detectors;    micropattern gaseous detectors;    Micromegas;    microfluidics;    scintillation detectors;    microfluidic scintillation detectors;   

DOI  :  10.3390/mi5030594

来源: mdpi

【 摘 要 】

Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.