Single ZnO Nanowire-Based Gas Sensors to Detect Low Concentrations of Hydrogen

Sensors

Marlene N. Cardoza-Contreras¹  José M. Romo-Herrera¹  Luis A. Ríos²  R. Garc໚-Gutiérrez³  T. A. Zepeda¹  Oscar E. Contreras¹ 

[1] Centro de Nanociencias y Nanotecnología, Universidad Nacional Autónoma de México, Baja California 22800, Mexico;Centro de Investigación Científica y de Educación Superior de Ensenada, Ensenada, Baja California 22860, Mexico;Departamento de Investigación en Física, Universidad de Sonora, Hermosillo 83000, Mexico;

关键词: nanowire;    sensors;    hydrogen;    SEM-FIB;    nano-fabrication;    devices;   

DOI  :  10.3390/s151229816

来源: mdpi

【 摘 要 】

Low concentrations of hazardous gases are difficult to detect with common gas sensors. Using semiconductor nanostructures as a sensor element is an alternative. Single ZnO nanowire gas sensor devices were fabricated by manipulation and connection of a single nanowire into a four-electrode aluminum probe in situ in a dual-beam scanning electron microscope-focused ion beam with a manipulator and a gas injection system in/column. The electrical response of the manufactured devices shows response times up to 29 s for a 121 ppm of H₂ pulse, with a variation in the nanowire resistance appreciable at room temperature and at 373.15 K of approximately 8% and 14% respectively, showing that ZnO nanowires are good candidates to detect low concentrations of H₂.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.