Effect of power variation on wettability and optical properties of co-sputtered titanium and zirconium oxynitride films

Bulletin of materials science

R Jayaganthan⁴  Sushant K Rawal²  Amit Kumar Chawla¹  Ramesh Chandra³ 

[1] Department of Physics, University of Petroleum and Energy Studies, Dehradun 248 007, India$$Department of Physics, University of Petroleum and Energy Studies, Dehradun 248 007, IndiaDepartment of Physics, University of Petroleum and Energy Studies, Dehradun 248 007, India$$;Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, India$$Centre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, IndiaCentre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, IndiaCentre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, India$$CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, IndiaCentre of Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$CHAMOS Matrusanstha Department of Mechanical Engineering, Charotar University of Science and Technology, Changa 388 421, India$$;Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Nano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, IndiaNano Science Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$;Centre of Nanotechnology, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Centre of Nanotechnology, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, IndiaCentre of Nanotechnology, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee 247 667, IndiaCentre of Nanotechnology, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$Department of Metallurgical and Materials Engineering, Indian Institute of Technology Roorkee, Roorkee 247 667, India$$

关键词: Titanium oxynitride;    zirconium oxynitride;    co-sputtering;    contact angle;    surface energy;    optical properties.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

The present paper deals with deposition of titanium and zirconium oxynitride films prepared from cosputtering titanium and zirconium targets by reactive RF magnetron sputtering. The effect of power variation on various properties of the deposited films is analysed. The film gets transformed from amorphous to well crystalline oxynitride films with gradual increase of target powers as observed from XRD graphs. The films exhibit hydrophilic and hydrophobic behaviours depending upon the presence of various phases. Surface energy decreases as the film properties change from hydrophilic to hydrophobic due to greater contact angle values. The optical properties were measured by UV�?�Vis�?�NIR spectrophotometer, transmission spectra and bandgap values show variation with respect to change in elemental composition as determined from EDS analysis.

【 授权许可】

Unknown