Effect of power variation on wettability and optical properties of co-sputtered titanium and zirconium oxynitride films

Bulletin of Materials Science

关键词: Titanium oxynitride;    zirconium oxynitride;    co-sputtering;    contact angle;    surface energy;    optical properties.;   

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

The present paper deals with deposition of titanium and zirconium oxynitride films prepared from cosputtering titanium and zirconium targets by reactive RF magnetron sputtering. The effect of power variation on various properties of the deposited films is analysed. The film gets transformed from amorphous to well crystalline oxynitride films with gradual increase of target powers as observed from XRD graphs. The films exhibit hydrophilic and hydrophobic behaviours depending upon the presence of various phases. Surface energy decreases as the film properties change from hydrophilic to hydrophobic due to greater contact angle values. The optical properties were measured by UV–Vis–NIR spectrophotometer, transmission spectra and bandgap values show variation with respect to change in elemental composition as determined from EDS analysis.

【 授权许可】

CC BY