Coefficient of friction of titanium oxynitride films deposited by hot target reactive sputtering

25th International Conference on Vacuum Technique and Technology

Shestakov, D.S.^1 ; Useinov, A.S.^1 ; Kravchuk, K.S.^1 ; Gladkikh, E.V.^1 ; Zavyalov, A.V.^1 ; Morozova, A.A.^1 ; Smirnov, V.V.^1

Saint-Petersburg State Electrotechnical University LETI, St.Petersburg, Russia^1

关键词: Coefficient of frictions;    Constant current;    Friction coefficients;    Gas environment;    Oxygen flow rates;    Reactive magnetron sputtering;    Regression model;    Titanium oxynitride;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012071/pdf
DOI  :  10.1088/1757-899X/387/1/012071

来源: IOP

【 摘 要 】

The influence of the oxygen flow rate on the friction coefficient of titanium oxynitride films deposited by reactive magnetron sputtering at a constant current of a hot target was investigated. The study used the plans of the active experiment and regression models of the first and second order. It is found that the increase of the oxygen flow rate in the gas environment leads to the increase of the film friction coefficient.