Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure

IEICE Electronics Express

Sang Uk Son²  Ho-Soo Park²  Jae-Sung Rieh¹  Chul-Soo Kim²  Yujie Ai²  Duck-Hwan Kim²  Insang Song²  Jing Cui²  Moon-Chul Lee²  Sungwoo Hwang²  Jea-Shik Shin² 

[1] School of Electrical Engineering, Korea University;Samsung Advanced Institute of Technology

关键词: BAW;    FBAR;    Q-factors;    RF resonator;   

DOI  :  10.1587/elex.11.20130938

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(7)A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.

【 授权许可】

Unknown