IEICE Electronics Express | |
Bulk acoustic wave resonator with suppressed energy loss using improved lateral structure | |
Sang Uk Son2  Ho-Soo Park2  Jae-Sung Rieh1  Chul-Soo Kim2  Yujie Ai2  Duck-Hwan Kim2  Insang Song2  Jing Cui2  Moon-Chul Lee2  Sungwoo Hwang2  Jea-Shik Shin2  | |
[1] School of Electrical Engineering, Korea University;Samsung Advanced Institute of Technology | |
关键词: BAW; FBAR; Q-factors; RF resonator; | |
DOI : 10.1587/elex.11.20130938 | |
学科分类:电子、光学、磁材料 | |
来源: Denshi Jouhou Tsuushin Gakkai | |
【 摘 要 】
References(7)A bulk acoustic wave (BAW) resonator with suppressed energy loss is proposed. Implemented with air edge reflector and current spreading electrode along the perimeter region of the BAW, the resonator successfully suppresses the acoustic wave leakage and the electric energy loss as well. As results of optimized lateral structure, the Q-factor at anti-resonance frequency (Qa) is significantly improved to over 2100. Furthermore, the peak insertion loss exhibits as low as 0.04dB and effective electro-mechanical coupling coefficient (kt2), which is essential to achieve wide band-width of RF filters, is 6.54%.
【 授权许可】
Unknown
【 预 览 】
Files | Size | Format | View |
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RO201911300139489ZK.pdf | 2705KB | download |