CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

Sensors

Martin Nirschl⁴  Arto Rantala³  Kari Tukkiniemi³  Sanna Auer¹  Ann-Charlotte Hellgren²  Dana Pitzer⁴  Matthias Schreiter⁴ 

[1] VTT Technical Research Centre of Finland, P.O. Box 1300, FI-33101 Tampere, Finland; E-Mails:;Biosensor Applications AB, Solna Strandväg 3, 171 54 Solna, Sweden; E-Mail:;VTT Technical Research Centre of Finland, Tietotie 3, Espoo, FI-02044 VTT, Finland; E-Mails:;Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany; E-Mails:

关键词: FBAR;    film bulk acoustic resonator;    CMOS;    DNA;    thickness shear mode;    TSM;    label-free;    biosensor;    biomolecular interaction analysis;   

DOI  :  10.3390/s100504180

来源: mdpi

【 摘 要 】

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.