Advanced scanning probe lithography using anatase-to-rutile transition to create localized TiO2 nanorods

Beilstein Journal of Nanotechnology

Julian Kalb^1¹ 

[1] Department of Physics, University of Konstanz, Universitätsstraße 10, 78457 Konstanz, Germany^1

关键词: hydrothermal crystal growth;    lithography;    nanostructures;    seed crystals;    surface processes;    oxides;   

DOI  :  10.3762/bjnano.10.40

学科分类：地球科学(综合)

来源: Beilstein - Institut zur Foerderung der Chemischen Wissenschaften

【 摘 要 】

In this article, we demonstrate the position-controlled hydrothermal growth of rutile TiO₂ nanorods using a new scanning probe lithography method in which a silicon tip, commonly used for atomic force microscopy, was pulled across an anatase TiO₂ film. This process scratches the film causing tiny anatase TiO₂ nanoparticles to form on the surface. According to previous reports, these anatase particles convert into rutile nanocrystals and provide the growth of rutile TiO₂ nanorods in well-defined areas. Due to the small tip radius, the resolution of this method is excellent and the method is quite inexpensive compared to electron-beam lithography and similar methods providing a position-controlled growth of semiconducting TiO₂ nanostructures.

【 授权许可】

CC BY