Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor

Proceedings

Steiner, Harald¹  Hortschitz, Wilfried²  Kainz, Andreas³  Stifter, Michael⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Sensor and Actuator Systems, TU Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: MEMS;    sensors;    electric field sensor;    electric field;    modelling;    equivalent circuit models;   

DOI  :  10.3390/proceedings2130712

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present a simple equivalent circuit model for the transfer function of an optomechanical MEMS transducer capable of distortion-free electric field strength measurements. This model allows not only to qualitatively understand the characteristics of the transducer but also takes into account parasitic effects and material properties. Such parasitic effects have been observed while evaluating the first results of electric field measurements performed with the sensor. The model helped to identify and diminish these parasitic effects.

【 授权许可】

CC BY