Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors

Sensors

Haiyan Zhang¹  Dongming Fang¹  Pengfei Yang¹  Chunrong Peng¹  Xiaolong Wen¹ 

[1] State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China; E-Mails:

关键词: electric field sensor;    charge leakage;    electric field attenuation;    water film thickness;    MEMS;   

DOI  :  10.3390/s120405105

来源: mdpi

【 摘 要 】

The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland