Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength

Proceedings

Steiner, Harald¹  Hortschitz, Wilfried²  Kainz, Andreas³  Kovacs, Gabor⁴ 

[1] Author to whom correspondence should be addressed.;Department for Integrated Sensor Systems, Danube University Krems, 2700 Wiener Neustadt, Austria;Institute of Sensor and Actuator Systems, TU-Wien, 1040 Vienna, Austria;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: electric field;    electric field sensor;    sensor;    distortion-free;    point-like;    MEMS;    MOEMS;   

DOI  :  10.3390/proceedings2130855

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We report on a new optical sensing principle for measuring the electric field strength based on MEMS technology. This method allows for distortion-free and point-like measurements with high stability regarding temperature. The main focus of this paper rests on an enhanced measurement set-up and the thereby obtained measurement results. These results reveal an improved resolution limit and point to the limitations of the current characterization approach. A resolution limit of 222 V/m was achieved while a further improvement of roughly one order of magnitude is feasible.

【 授权许可】

CC BY