Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams. Erratum

IUCrJ

Soltwisch, V.¹  Pflger, M.² 

[1] Helmholtz-Zentrum Berlin (HZB), Albert-Einstein-Strae 15, 12489 Berlin, Germany;Physikalisch-Technische Bundesanstalt (PTB), Abbestrae 2-12, 10587 Berlin, Germany

关键词: GRAZING-INCIDENCE SMALL-ANGLE X-RAY SCATTERING;    GISAXS;    BEAM FOOTPRINT;    LITHOGRAPHIC INSPECTION;    GRATINGS;   

DOI  :  10.1107/S2052252518008497

学科分类：数学（综合）

来源: International Union of Crystallography

【 摘 要 】

An error in the paper by Pflüger, Soltwisch, Probst, Scholze & Krumrey [IUCrJ (2017), 431–438] is corrected.

【 授权许可】

CC BY