期刊论文详细信息
| IUCrJ | |
| Grazing-incidence small-angle X-ray scattering (GISAXS) on small periodic targets using large beams | |
| Probst, J.1 Krumrey, M.2 Soltwisch, V.2 Pflüger, M.2 Scholze, F.2 | |
| [1] Helmholtz-Zentrum Berlin (HZB), Albert-Einstein-Straße 15, 12489 Berlin, Germany;Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587 Berlin, Germany | |
| 关键词: GRAZING-INCIDENCE SMALL-ANGLE X-RAY SCATTERING; GISAXS; BEAM FOOTPRINT; LITHOGRAPHIC INSPECTION; GRATINGS; | |
| DOI : 10.1107/S2052252517006297 | |
| 学科分类：数学（综合） | |
| 来源: International Union of Crystallography | |
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