In Situ X-ray Measurements to Follow the Crystallization of BaTiO3 Thin Films during RF-Magnetron Sputter Deposition

Applied Sciences

Uwe Klemradt¹  Christian Bonar Zeuthen²  Peter Walter³  Wiebke Ohm³  JanTorben Roeh³  Markus Ilchen³ 

[1] 2nd. Institute of Physics B and JARA-FIT, RWTH Aachen University, Otto-Blumenthal-Str. 1, D-52074 Aachen, Germany;Department of Chemistry, Aarhus University, Langelandsgade 140, 8000 Aarhus C, Denmark;Deutsches Elektronen-Synchrotron, Notkestr. 85, 22607 Hamburg, Germany;

关键词: GISAXS;    GIXRPD;    XRR;    in situ;    synchrotron radiation;    oxid thin films;   

DOI  :  10.3390/app11198970

来源: DOAJ

【 摘 要 】

Here, we report on adding an important dimension to the fundamental understanding of the evolution of the thin film micro structure evolution. Thin films have gained broad attention in their applications for electro-optical devices, solar-cell technology, as well storage devices. Deep insights into fundamental functionalities can be realized via studying crystallization microstructure and formation processes of polycrystalline or epitaxial thin films. Besides the fundamental aspects, it is industrially important to minimize cost which intrinsically requires lower energy consumption at increasing performance which requires new approaches to thin film growth in general. Here, we present a state of the art sputtering technique that allows for time-resolved in situ studies of such thin film growth with a special focus on the crystallization via small angle scattering and X-ray diffraction. Focusing on the crystallization of the example material of BaTiO${}_3$, we demonstrate how a prototypical thin film forms and how detailed all phases of the structural evolution can be identified. The technique is shaped to enable a versatile approach for understanding and ultimately controlling a broad variety of growth processes, and more over it demonstrate how to in situ investigate the influence of single high temperature sputtering parameters on the film quality. It is shown that the whole evolution from nucleation, diffusion adsorption and grain growth to the crystallization can be observed during all stages of thin film growth as well as quantitatively as qualitatively. This can be used to optimize thin-film quality, efficiency and performance.

【 授权许可】

Unknown