Analysis and design of pressure sensors for micromechanical integrated pressure sensors

9th International Multidisciplinary Scientific and Research Conference "Modern Issues in Science and Technology" Workshop "Advanced Technologies in Aerospace, Mechanical and Automation Engineering"

自然科学;工业技术

Kalinkina, M.E.^1 ; Kozlov, A.S.^1 ; Labkovskaia, R.Y.^1 ; Pirozhnikova, O.I.^1 ; Tkalich, V.L.^1

Faculty of Information Technology Security, ITMO University, St. Petersburg, Russia^1

关键词: Accuracy rate;    Integrated pressure;    Metrological characteristics;    Micro-mechanical;    Pressure-sensitive elements;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/450/3/032004/pdf
DOI  :  10.1088/1757-899X/450/3/032004

来源: IOP

【 摘 要 】

Accelerometers, pressure sensors and gyros have good prospects for the future among the wide range of micromechanical instruments that are developing most dynamically. The paper describes the modified version of the design of the pressure sensitive element created by the author with improved metrological characteristics and increased accuracy rates.