Chromium-nanodiamond coatings obtained by magnetron sputtering and their tribological properties

24th International Conference on Vacuum Technique and Technology

Atamanov, M.V.^1 ; Khrushchov, M.M.^2 ; Marchenko, E.A.^2 ; Shevchenko, N.V.^3 ; Levin, I.S.^2,4 ; Petrzhik, M.I.^5 ; Miroshnichenko, V.I.^1 ; Relianu, M.D.^4

INACOTEC Centre Ltd., Moscow

117325, Russia^1

Institute of Machine Studies, Russian Academy of Sciences, Moscow

101990, Russia^2

Petrovsky Scientific Centre, FOUGAS, JSC, Moscow

117447, Russia^3

Department of Physics, Moscow State University, Moscow

119991, Russia^4

National Research Technological University, MISiS, Moscow

119049, Russia^5

关键词: Chemical and phase compositions;    Chromium-based;    Micro-mechanical;    Tribological properties;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012034/pdf
DOI  :  10.1088/1742-6596/872/1/012034

来源: IOP

【 摘 要 】

Peculiarities of structure, chemical and phase composition, micromechanical and tribological properties of chromium-based coatings obtained by magnetron-sputtering of composite and/or compacted chromium-nanodiamond targets have been investigated.