Studies of the Cr-CrN coating characteristics formed by means of the magnetron sputtering method from bulk target

24th International Conference on Vacuum Technique and Technology

Kachalin, G.V.^1 ; Mednikov, A.F.^1 ; Tkhabisimov, A.B.^1 ; Sidorov, S.V.^1

Moscow Power Engineering Institute, Moscow

111250, Russia^1

关键词: Chromium-based;    Coating characteristics;    Coating thickness;    CrN-based coatings;    Incubation periods;    Layered Structures;    Magnetron sputtering method;    Nitride layers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012040/pdf
DOI  :  10.1088/1742-6596/872/1/012040

来源: IOP

【 摘 要 】

The paper presents the study's results of ion-plasma chromium based coating characteristics produced on blade steel samples 12Kh13 and EI961 by means of the magnetron sputtering method from the bulk "hot" target. A set of metallographic studies and erosion tests of coatings were carried out using the research equipment URI (unique research installation) "Hydroshock rig Erosion-M" of NRU "MPEI". Cr-CrN based coatings have a layered structure; thickness of intermediate Cr layers ranges from 0.7 to 1.7 μm, thickness of nitride layers CrN ranges from 1.5 to 4 μm, while the overall coating thickness is 17.0-21.5 μm; coating microhardness is 1830-1880 HV0.05. The resulting coatings are found to increase 1.5 times the incubation period duration of erosion wear for steels 12Kh13 and EI961; they reduce the maximum erosion rate 1.3 times, and the steady erosion rate - 1.5 times.