Effect of structure and deposition technology on tribological properties of DLC coatings alloyed with VIA group metals

23rd International Conference on Vacuum Technique and Technology

Khrushchov, M.^1 ; Levin, I.^1,2 ; Marchenko, E.^1 ; Avdyukhina, V.^2 ; Petrzhik, M.^3

Institute of Machine Studies, Russian Academy of Sciences, Moscow

101990, Russia^1

Department of Physics, Moscow State University, Moscow

119991, Russia^2

National Research Technological University MISiS, Moscow

119049, Russia^3

关键词: Comprehensive research;    Deposition technology;    Micro-mechanical;    Organic precursor;    Plasma assisted chemical vapor deposition;    Reactive magnetron sputtering;    Tribological characteristics;    Tribological properties;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012016/pdf
DOI  :  10.1088/1742-6596/729/1/012016

来源: IOP

【 摘 要 】

The results of a comprehensive research on atomic structure, phase composition, micromechanical and tribological characteristics of alloyed DLC coatings have been presented. The coatings have been deposited by reactive magnetron sputtering in acetylene-nitrogen gas mixtures of different compositions (a-C:H:Cr), by plasma-assisted chemical vapor deposition in atmospheres of silicone-organic precursor gases (a-C:H:Mo:Si), and by nonreactive magnetron sputtering of a composite target (a-C:H:W).