Modelling of local anodic oxidation of titanium oxide nanostructures formation process

Scanning Probe Microscopy 2018

Karen'Kih, O.G.^1 ; Avilov, V.I.^1 ; Smirnov, V.A.^1 ; Fedotov, A.A.^1 ; Sharapov, N.A.^1 ; Polupanov, N.A.^1

Southern Federal University, Institute of Nanotechnologies Electronics and Equipment Engineering, Taganrog

344006, Russia^1

关键词: Applied voltages;    Formation process;    Local anodic oxidation;    Oxide nanostructures;    Technological parameters;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/443/1/012013/pdf
DOI  :  10.1088/1757-899X/443/1/012013

来源: IOP

【 摘 要 】

A model for the oxide nanostructures formation by the local anodic oxidation method is presented. Dependences of height, depth, and diameter of titanium oxide nanostructures on the applied voltage pulse duration are obtained, as well as the oxide nanostructures profile for given technological parameters.