会议论文详细信息
Scanning Probe Microscopy 2018 | |
Modelling of local anodic oxidation of titanium oxide nanostructures formation process | |
Karen'Kih, O.G.^1 ; Avilov, V.I.^1 ; Smirnov, V.A.^1 ; Fedotov, A.A.^1 ; Sharapov, N.A.^1 ; Polupanov, N.A.^1 | |
Southern Federal University, Institute of Nanotechnologies Electronics and Equipment Engineering, Taganrog | |
344006, Russia^1 | |
关键词: Applied voltages; Formation process; Local anodic oxidation; Oxide nanostructures; Technological parameters; | |
Others : https://iopscience.iop.org/article/10.1088/1757-899X/443/1/012013/pdf DOI : 10.1088/1757-899X/443/1/012013 |
|
来源: IOP | |
【 摘 要 】
A model for the oxide nanostructures formation by the local anodic oxidation method is presented. Dependences of height, depth, and diameter of titanium oxide nanostructures on the applied voltage pulse duration are obtained, as well as the oxide nanostructures profile for given technological parameters.
【 预 览 】
Files | Size | Format | View |
---|---|---|---|
Modelling of local anodic oxidation of titanium oxide nanostructures formation process | 701KB | download |