Modern technologies of X-ray systems for control of electronic components

25th International Conference on Vacuum Technique and Technology

Potrakhov, N.N.^1 ; Bessonov, V.B.^1 ; Obodovskiy, A.V.^1 ; Gryaznov, A.Y.^1 ; Guk, K.K.^1 ; Staroverov, N.E.^1

Saint Petersburg Electrotechnical University LETI, Saint Petersburg

197376, Russia^1

关键词: Electronic component;    Functional capabilities;    Key elements;    Micro-electronic devices;    Micro-focus x-ray tubes;    Modern technologies;    Technology and designs;    X-ray system;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/387/1/012061/pdf
DOI  :  10.1088/1757-899X/387/1/012061

来源: IOP

【 摘 要 】

Some issues of technology and design of modern X-ray devices for quality control of microelectronic devices are considered. The functional capabilities of both types of technologies are compared. The design of the Russian microfocus X-ray tube - a key element of the devices for control, is described.