From superresolution to nanodetection: overview of far field optical nanoscopy techniques for nanostructures

INERA Conference 2015: Light in Nanoscience and Nanotechnology

Montgomery, P.C.^1 ; Leong-Hoi, A.^1 ; Anstotz, F.^1 ; Mitev, D.^2 ; Pramatarova, L.^2 ; Haeberlé, O.^3

Laboratoire des Sciences de l'Ingénieur, De l'Informatique et de l'Lmagerie (ICube), University of Strasbourg-CNRS, 23 rue du Loess, Strasbourg

67037, France^1

Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee blvd., Sofia

1784, Bulgaria^2

Laboratoire MIPS, Universite de Haute-Alsace, Ecole Nationale Superiéure d'Ingénieurs Sud Alsace (ENSISA), 12 rue des Fréres Lumiére, Mulhouse

68093, France^3

关键词: Classification scheme;    Contrast Enhancement;    Critical dimension measurement;    Interference microscopy;    Micro-electronic devices;    Nanostructured surface;    Phase-contrast microscopy;    Through-focus scanning;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/682/1/012010/pdf
DOI  :  10.1088/1742-6596/682/1/012010

来源: IOP

【 摘 要 】

Far field optical nanoscopy has been brought to the forefront with the 2014 Nobel Prize for chemistry in fluorescent nanoscopy for revealing intra-cellular details of tens of nm. In this review, we present an improved classification scheme that summarizes the many optical nanoscopy techniques that exist. We place particular emphasis on unlabelledsuperresolution techniques that provide real improved resolving power and unlabellednanodetection techniques for characterizing unresolved nanostructures. Superresolution is illustrated with sub-100 nm imaging of diatoms with tomographic diffractive microscopyand adenoviruseswith submerged microsphere optical nanoscopy. Three sub-categories of nanodetectionare then presented. Contrast enhancement is illustrated with surface enhanced ellipsometric contrast microscopy for the study of bacterial motility and strobed phase contrast microscopy for measuring the mechanical properties of vesicle membranes. High sensitivity phase measurement using interference microscopy demonstrates how nanostructured surfaces and structures can be characterized in biomaterials, laser textured stainless steel and defects within thin polymer films. Finally, deconvolution is illustrated with the use of through-focus scanning optical microscopy in critical dimension measurement and characterization of 40 nm linewidths in microelectronic devices. In this way we show how new far field optical nanoscopy techniques are being developed for unlabelled characterization of nano and biomaterials.