Application of focused ion beam for the fabrication of AFM probes

Scanning Probe Microscopy 2017

Kolomiytsev, A.S.^1 ; Lisitsyn, S.A.^1 ; Smirnov, V.A.^1 ; Fedotov, A.A.^1 ; Varzarev, Yu.N.^1

Southern Federal University, Institute of Nanotechnologies, Electronics, and Electronic Equipment Engineering, Taganrog

347922, Russia^1

关键词: AFM image;    AFM probe;    Critical dimension;    High-efficiency;    Induced deposition;    Probe tips;    Technological process;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/256/1/012007/pdf
DOI  :  10.1088/1757-899X/256/1/012007

来源: IOP

【 摘 要 】

The results of an experimental study of the probe tips fabrication for critical-dimension atomic force microscopy (CD-AFM) using the focused ion beam (FIB) induced deposition are presented. Methods of the FIB-induced deposition of tungsten and carbon onto the tip of an AFM probe are studied. Based on the results obtained in the study, probes for the CD-AFM technique with a tip height about 1 μm and radius of 20 nm were created. The formation of CD-AFM probes by FIB-induced deposition allows creating a high efficiency tool for nanotechnology and nanodiagnostics. The use of modified cantilevers allows minimizing the artefacts of AFM images and increasing the accuracy of the relief measurement. The obtained results can be used for fabrication of AFM probes for express monitoring of the technological process in the manufacturing of the elements for micro- and nanoelectronics.