Image reconstruction of TGZ3 grating by eliminating tip-sample convolution effect in AFM

Micro & nano letters

article

Teng Wu¹  Luyao Lv¹  Yu Zou¹  Guoqiang Han¹ 

[1] School of Mechanical Engineering and Automation, Fuzhou University;Key Laboratory of Fluid Power and Intelligent Electro-Hydraulic Control, Fuzhou University

关键词: calibration;    measurement errors;    atomic force microscopy;    image reconstruction;    TGZ3 grating;    tip-sample convolution effect;    meticulous measurement;    surface information;    atomic force microscopy;    measurement error;    probe driver;    tip characteristics;    probe tip;    AFM nanoscale measurements;    AFM tip;    AFM image;    actual sample morphology;    accurate AFM images;    geometric measurement model;    blind tip reconstruction;    grating samples;    mounting inclination angle;    image reconstruction quality;   

DOI  :  10.1049/mnl.2020.0378

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Accurate and meticulous measurement is an important prerequisite to obtain the real surface information of samples in atomic force microscopy (AFM). A severe problem is the frequent occurrence of measurement errors, which are mainly caused by the nonlinearity of the probe driver, the temperature drift of the system and the tip characteristics. The measurement errors caused by probe tip are the main source of errors in AFM nanoscale measurements. The shape and state of AFM tip will distort the AFM image from the actual sample morphology. If the information about the probe is known, the measurement error caused by the probe tip can be greatly reduced. In order to obtain accurate AFM images, a new method based on geometric measurement model and blind tip reconstruction is proposed to eliminate tip-sample convolution in the measurement of grating samples. The static and dynamic characteristics of the AFM tip are described by four parameters: cone angle, curvature radius, scanning inclination angle and mounting inclination angle. Finally, the feasibility and effectiveness of the new calibration method are verified by evaluating the image reconstruction quality. In conclusion, the proposed method can effectively reconstruct accurate AFM images of the grating.

【 授权许可】

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