Silicon on insulator pressure sensor based on a thermostable electrode for high temperature applications

Micro & nano letters

article

G.D. Liu¹  W.P. Cui¹  H. Hu¹  F.S. Zhang¹  Y.X. Zhang¹  C.C. Gao¹  Y.L. Hao¹ 

[1] National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University;State Key Laboratory of Transducer Technology, Chinese Academy of Sciences;Collaborative Innovation Center for Micro/Nano Fabrication, Device and System;Innovation Center for MicroNanoelectronics and Integrated System

关键词: silicon;    elemental semiconductors;    silicon-on-insulator;    pressure sensors;    electrodes;    titanium;    titanium compounds;    platinum;    gold;    ohmic contacts;    thermal stability;    transmission lines;    Auger electron spectra;    measurement errors;    calibration;    silicon on insulator pressure sensor;    thermostable electrode;    high temperature applications;    thermal stability;    ohmic contacts;    linear transmission line method;    Auger electron spectroscopy;    calibration;    nonlinearity error;    sensitivity;    pressure 30 kPa to 150 kPa;    temperature 500 degC;    Ti-TiN-Pt-Au;    Si;   

DOI  :  10.1049/mnl.2015.0181

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

Rate induced left bundle branch block (LBBB) is a rare peri-operative phenomenon. We encountered rate related LBBB in a 72 year old patient who had undergone a craniotomy. Acute coronary event was ruled out by doing serial troponin-I levels and absence of new onset regional wall motion abnormalities on echocardiogram. The electrocardiographic changes reverted to normal after controlling the rate with β blockers. Further cardiac evaluation was advised but the patient and family opted for a conservative medical management considering his age and co-morbidities.

【 授权许可】

CC BY|CC BY-ND|CC BY-NC|CC BY-NC-ND