Electrostatically driven and capacitively detected differential lateral resonant pressure microsensor

Micro & nano letters

article

Hailong Jiao¹  Bo Xie¹  Junbo Wang¹  Deyong Chen¹  Jian Chen¹ 

[1] State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences;College of Electrical and Communication Engineering, University of Chinese Academy of Sciences

关键词: capacitive sensors;    capacitors;    diaphragms;    elemental semiconductors;    microsensors;    numerical analysis;    pressure measurement;    pressure sensors;    resonators;    silicon;    silicon-on-insulator;    sputter etching;    microfabrication;    Si;    weather station;    pressure monitoring;    linear resonant frequency shift;    closed-loop test;    quality factor;    open-loop characterisation platform;    deep reactive ion etching;    wet etching;    sputter;    silicon-on-insulator wafer;    numerical simulation;    sensor stability;    interference;    differential frequency output redution;    intrinsic resonant frequency;    diaphragm deflection;    pressure measurement;    resonator;    microfabrication;    capacitively detected differential lateral resonant pressure microsensor;    electrostatically driven differential lateral resonant pressure microsensor;   

DOI  :  10.1049/mnl.2013.0271

学科分类：计算机科学（综合）

来源: Wiley

【 摘 要 】

We present a case of COVID-19 patient, who had multiple comorbidities, including diabetes mellitus, bronchial asthma, morbid obesity (BMI:48) and obstructive sleep apnea. She had good compliance with CPAP treatment. After a vacation, she developed typical symptoms of COVID-19, including fever, cough with blood tinged sputum and shortness of breath. She had to be treated with polypharmacy for all of her concurrent diseases. Her hypoxia responded well to oxygen therapy. Laboratory reports and chest x-rays presented a typical picture of COVID-19, including lymphopenia and lung infiltrates. Patient received inj. ceftriaxone, inj. azithromycin and hydroxychloroquine, to which her response was quite satisfactory and after two weeks, she was discharged and shifted to home.

【 授权许可】

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