Finishing technologies for processing of optical microelectronic items

1st International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"

无线电电子学

Muratov, K.R.^1 ; Ablyaz, T.R.^1 ; Gashev, E.A.^1 ; Khanov, A.M.^1 ; Varlamov, N.V.^2

Perm National Research Polytechnic University, Komsomolsky prospekt 29, Perm, Perm krai

614990, Russia^1

National Research Nuclear University, MEPhI (Moscow Engineering Physics Institute), Kashirskoe shosse 31, Moscow

115409, Russia^2

关键词: Comparative studies;    Finishing technology;    Lithium niobate single crystals;    Polishing tool;    Relative motion;    Removal capacity;    Specific pressure;    Strength property;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/151/1/012043/pdf
DOI  :  10.1088/1757-899X/151/1/012043

来源: IOP

【 摘 要 】

This article discusses comparative studies of the influence of specific pressure and speed of relative motion of tool and item on polishing capacity and quality of processed surface of lithium niobate single crystal. The equation for calculation of total depth of layer destroyed upon finishing and time of polishing required for its removal. Analysis of polishing tool has accounted for strength properties of the polishing material, removal capacity, and quality of processed surface of lithium niobate single crystal. It is experimentally established that upon basic pressure both for woven and unwoven polishers with the highest capacity the lower limit of grain coarseness of polishing suspension is 1/0.5 μm. A reserve of increase in shape accuracy and polishing quality is the use of polishers with equal thickness and structure of working surface.