Probe measurements of magnetron discharge parameters

23rd International Conference on Vacuum Technique and Technology

Karzin, V.^1 ; Smirnov, V.^1

St. Petersburg State Electrotechnical University LETI, 5 Prof. Popov Street, St. Petersburg

194354, Russia^1

关键词: Discharge parameters;    Langmuir probe measurements;    Magnetron discharges;    Planar magnetron;    Positive column;    Probe measurements;    Titanium targets;    Working gas pressure;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012021/pdf
DOI  :  10.1088/1742-6596/729/1/012021

来源: IOP

【 摘 要 】

Langmuir probe measurements have been carried out in a positive column discharge of a planar magnetron with a titanium target. In this work concentration and temperature of electrons is measured in positive column of magnetron discharge with Langmuir probe. Concentration of electrons is found to be on the level of 1016m-3at a notable distance (over 200 mm). Two groups of electrons exist: «cold» and «hot» with average temperature of 16 000 and 41 000 K respectively. Dependence of discharge parameters on working gas pressure is measured.