Langmuir probe measurements of an RF driven high-density inductively coupled argon plasma

4th International Conference on Energy Equipment Science and Engineering

Ni, Weiyuan^1^2 ; Song, Guicai^1 ; Liu, Dongping^2

School of Science, Changchun University of Science and Technology, Changchun, China^1

School of Electrical Engineering, Dalian University of Technology, Dalian, China^2

关键词: Argon plasmas;    Axial direction;    Gas pressures;    Inductively-coupled;    Langmuir probe measurements;    Plasma potential;    Quartz glass;    Rf-power;   

Others  :  https://iopscience.iop.org/article/10.1088/1755-1315/242/2/022043/pdf
DOI  :  10.1088/1755-1315/242/2/022043

来源: IOP

【 摘 要 】

In this paper, a high-density inductively coupled argon plasma was generated by an RF power supply, and the plasma density, electron temperature, and plasma potential were measured by a Langmuir probe. It was found that the plasma density, electron temperature, and plasma potential along the quartz glass tube axial direction increased in the range of 0.37x1019-6.75x1019 m-3, 3.44-5.91 eV, and 11.92-20.09 V respectively, when the incident RF power increased from 3 kV to 8 kV at a gas pressure of 25 Pa. The maximum values of the plasma density and plasma potential appear in the position of coil center and the electron temperature in the coil region almost unchanged.