PECVD polymerised coatings on thermo-sensitive plastic support

INERA Conference 2015: Light in Nanoscience and Nanotechnology

Mitev, D.^1 ; Radeva, E.^1 ; Peshev, D.^2 ; Cook, M.^3 ; Peeva, L.^3

REGPOT-2012-2013-1 NMP INERA Project, Institute of Solid State Physics-BAS, 72 Tzarigradsko Chaussee Blvd., Sofia

1784, Bulgaria^1

University of Chemical Technology and Metallurgy, Department of Chemical Engineering, 8 Kl. Ohridsky Blvd., Sofia

1756, Bulgaria^2

Chemical Engineering and Chemical Technology, Imperial College London, Exhibition Road, London

SW7 2AZ, United Kingdom^3

关键词: Functional layer;    Hexamethyl disiloxane;    PECVD depositions;    Plasma enhanced chemical vapour depositions (PECVD);    Plastic substrates;    Plastic supports;    Polymer Coating;    Thermo sensitive;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/682/1/012014/pdf
DOI  :  10.1088/1742-6596/682/1/012014

来源: IOP

【 摘 要 】

With this paper we describe several alternative approaches aimed at polymer-on- polymer coatings, produced by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique. In our case three types of input compounds were applied for varied "cold plasma" PECVD deposition of nano-thick functional layers: namely hexamethyldisiloxane (HMDSO), pentane and toluene onto plastic substrates. The output characterisations through SEM imaging, ATR-FTIR, EDX, AFM and contact angle measurements, proved the methods' feasibility and properties of the plasma-polymerised coatings.