An in-house developed annular bright field detection system

Electron Microscopy and Analysis Group Conference 2013

Lari, Leonardo^1,2 ; Wright, Ian^2 ; Pingstone, Daniel^2 ; Steward, Jonathan^2 ; Gilks, Daniel^2 ; Lazarov, Vlado K.^2

Department of Physics, University of York, Heslington, YO10 5DD, York, United Kingdom^1

York-JEOL Nanocentre, York Science Park, Heslington, YO10 5BR, York, United Kingdom^2

关键词: Aberration-corrected;    Bright fields;    Detection system;    Direct imaging;    High vacuum;    Scattered electrons;    Shadowing mechanisms;    Zero angle;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/522/1/012016/pdf
DOI  :  10.1088/1742-6596/522/1/012016

来源: IOP

【 摘 要 】

Annular bright field (ABF) detectors have been developed in the last few years allowing the direct imaging of low-Z atoms from oxygen down to hydrogen. These types of detectors are now available as standard attachments for the latest generation of top-end electron microscopes. However these systems cannot always be installed in previous generation microscopes. In this paper we report the preliminary results of an in-house implementation of a ABF detection system on a CEOS aberration corrected JEOL 2200FS STEM. This has been obtained by exploiting the standard BF detector coupled with a high vacuum compatible, X-ray tight and retractable shadowing mechanism. This results in the acquisition of near zero-angle scattered electrons with inner collection semi-angle from 2.0 mrad to 23 mrad and outer semi-angle in the range from 3.0 mrad to 35 mrad. The characteristics and performances of this ABF detection system are discussed.