Study of phase transitions in NbN ultrathin films under composite ion beam irradiation

10th International School-Conference on Materials for Extreme Environment: Development, Production and Application

Prikhodko, K.^1,2 ; Gurovich, B.^1 ; Dement'Eva, M.^1

National Research Centre, Kurchatov Institute, Kurchatov sq.1, Moscow

123182, Russia^1

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, Kashirskoe highway, 31, Moscow

115409, Russia^2

关键词: Atomic compositions;    Bright fields;    Fourier transformations;    HRTEM images;    Ion beam irradiation;    Low dose;    Niobium oxynitrides;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/130/1/012046/pdf
DOI  :  10.1088/1757-899X/130/1/012046

来源: IOP

【 摘 要 】

This work demonstrates implementation of Selective Displacement of Atoms (SDA) technique to change the crystal structure and atomic composition of thin superconductive film of NbN under low dose composite ion beam irradiation. All structure investigations were performed using High Resolution Transmission Electron Microscopy (HRTEM) technique by the analysis of Fourier transformation of bright field HRTEM images. It was found that composite ion beam irradiation induces the formation of niobium oxynitrides phases.