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  • × 25th International Conference on Vacuum Technique and Technolog
  • × Discharge voltages
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1 Current-voltage characteristics of magnetron with hot target [会议论文]

作者:Shapovalov, V.I.^1, Minzhulina, E.A.^1, Smirnov, V.V.^1

关键词:Abnormal glow discharge;Argon environment;...

会议举办机构:Saint-Petersburg State Electrotechnical University LETI, St. Petersburg, Russia^1

会议时间:2018

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2 Obtaining of non-stoichiometric titanium oxide using reactive magnetron sputtering [会议论文]

作者:Udovichenko, S.Y.^1;Bobylev, A.N.^1;Belotserkovtseva, D.A.^1;等

关键词:Discharge voltages;Film sputtering;...

会议举办机构:Research and Education Center Nanotechnology, Tyumen State University, Tyumen

会议时间:2018

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3 System for deposition of diamond like a-C:H films in Ar-C2H2 plasma with ion beam assistance [会议论文]

作者:Lopatin, I.V.^1;Akhmadeev, Yu. H.^1;Yu Ignatov, D.^1;等

关键词:a-C:H films;Diamond-like;...

会议举办机构:Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences (IHCE SB RAS), Tomsk

会议时间:2018

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