PE-ALD로 증착한 orthorhombic SnO2 박막의 epitaxial 성장및 가스감응특성

Orthorhombic SnO2;PE-ALD;epitaxy;가스센서;620

공과대학 재료공학부 ;

University:서울대학교 대학원

关键词: Orthorhombic SnO2;    PE-ALD;    epitaxy;    가스센서;    620;   

Others  :  http://s-space.snu.ac.kr/bitstream/10371/123232/1/000000002936.pdf

美国|英语

来源: Seoul National University Open Repository

【 摘 要 】

[10] YSZ, respectively. These results are reconfirmed by cross-section HRTEM. All the SnO2 films exhibited a similar electrical resistivity of ~2 x 10-2 Ω㎝ and the average transmittance of 78% in the visible range and thus the electrical and optical properties were not noticeably changed with film orientation and phase. The gas sensing properties were measured using the flow type sensing equipment. The H2, CO, and ethanol gas sensing properties were determined by measuring the changes in electric resistance between sample gas and pure air. Most films exhibited the maximum gas response at 350℃ and poly crystalline rutile SnO2, which is deposited on (111) YSZ substrate exhibited the highest gas response and the sensitivity of (100) O-SnO2 is 3 times higher than (110) O-SnO2toward H2 gas.