Chemical vapor deposition and characterization of zirconium tin titanate as a high dielectric constant material for potential electronic applications

Zirconium alloys Analysis;Thin films;Chemical vapor deposition;Dielectrics

Mays, Ebony Lynn ; Materials Science and Engineering

University:Georgia Institute of Technology

Department:Materials Science and Engineering

关键词: Zirconium alloys Analysis;    Thin films;    Chemical vapor deposition;    Dielectrics;   

Others  :  https://smartech.gatech.edu/bitstream/1853/5422/1/mays_ebony_l_200312_phd.pdf

美国|英语

来源: SMARTech Repository