Morphological study of TiO₂ thin films doped with cobalt by Metal Organic Chemical Vapor Deposition

Results in Physics

Miguel Apátiga-Castro¹  Rodrigo Velázquez-Castillo²  Alejandro Manzano-Ramírez²  Eric M. Rivera-Muñoz³  Carlos Alberto-González⁴  Marco Zamora-Antuñano⁵  Néstor Méndez-Lozano⁵ 

[1]Corresponding author.

[2]Centro de Física Aplicada y Tecnología Avanzada, Universidad Nacional Autónoma de México, A.P. 1-1010, Querétaro, Qro C. P. 76000, Mexico

[3]Centro de Investigación y de Estudios Avanzados, Unidad Querétaro, Libramiento Norponiente2000. Fracc. Real de Juriquilla, Querétaro, Qro 76230, Mexico

[4]División de Investigación y Posgrado, Universidad Autónoma de Querétaro, Cerro de las Campanas S/N, Querétaro, Qro C.P 76010, Mexico

[5]Universidad del Valle de México, Campus Querétaro, Blvd. Juriquilla No. 1000 A, Del. Santa Rosa Jáuregui, Querétaro, Qro C.P. 76230, Mexico

关键词: Thin films;    Anatase films;    Chemical vapor deposition;    Nanostructure;   

DOI  :  

来源: DOAJ

【 摘 要 】

In this work, we present the synthesis of thin films of TiO2 doped with cobalt using the MOCVD technique, allowing the growth of coatings with controlled morphology and a faster deposit speed, as compared to other techniques. In addition, the synthesis parameters necessary for the reproducibility of the films were obtained. Anatase thin films doped with cobalt were prepared by the Metal Organic Chemical Vapor Deposition technique working in pulsed injection mode using a mixture of titanium (IV) isopropoxide and acetyl acetonate of cobalt at different concentrations as the precursor. The films were deposited on silicon (1 0 0) substrates at temperature of 650 °C. The crystalline structure of the deposited films was characterized by X-ray diffraction (XRD) and Raman spectroscopy. The characteristic XRD peaks and vibrational modes of TiO2 corresponding to the anatase phase were observed in all cases, without any secondary or mixed phase. On the other hand, the scanning electron microscopy (SEM) observations show that the film surfaces are formed by a higher number of porous, which are characteristic of the anatase films and the corresponding Energy Dispersion Spectroscopy (EDS) shows the elemental composition.

【 授权许可】

Unknown