Selective area growth and characterization of GaN based nanostructures by metal organic vapor phase epitaxy

Nanostructures;III-nitride;GaN;Selective area growth;Metal organic vapor phase epitaxy

Goh, Wui Hean ; Electrical and Computer Engineering

University:Georgia Institute of Technology

Department:Electrical and Computer Engineering

关键词: Nanostructures;    III-nitride;    GaN;    Selective area growth;    Metal organic vapor phase epitaxy;   

Others  :  https://smartech.gatech.edu/bitstream/1853/47720/1/goh_wuihean_201305_phd.pdf

美国|英语

来源: SMARTech Repository

【 摘 要 】

The objective of this project is to establish a new technology to grow high quality GaN based material by nano selective area growth (NSAG). The motivation is to overcome the limit of the conventional growth method, which yield a high density of dislocation in the epitaxial layer. A low dislocation density in the epitaxial layer is crucial for high performance and high efficiency devices. This project focuses on growth and material characterization of GaN based nanostructures (nanodots and nanostripes) grown using the NSAG method that we developed.NSAG, with a precise control of diameter and position of nanostructures opens the door to new applications such as: 1) single photon source, 2) photonic crystal, 3) coalescence of high quality GaN template, and 4) novel nanodevices.