InN Based Water Condensation Sensors on Glass and Flexible Plastic Substrates

Sensors

Viorel Dumitru³  Stefan Costea³  Mihai Brezeanu³  George E. Stan¹  Cristina Besleaga¹  Aurelian C. Galca¹  Gabriela Ionescu² 

[1] National Institute of Materials Physics, Atomistilor 105 bis, Magurele 077125, Romania; E-Mails:;Petroleum-Gas University of Ploiesti, Blvd. Bucuresti no 39, Ploieşti 100680, Romania; E-Mails:;Honeywell Romania S.R.L, Sensors & Wireless Laboratory Bucharest, Calea Floreasca 169A, Building A, Bucharest 014459, Romania; E-Mails:

关键词: III-nitride;    indium nitride;    condensation sensor;    surface accumulation layer;   

DOI  :  10.3390/s131216940

来源: mdpi

【 摘 要 】

In this paper, we report the realization and characterization of a condensation sensor based on indium nitride (InN) layers deposited by magnetron sputtering on glass and flexible plastic substrates, having fast response and using potentially low cost fabrication technology. The InN devices work as open gate thin film sensitive transistors. Condensed water droplets, formed on the open gate region of the sensors, deplete the electron accumulation layer on the surface of InN film, thus decreasing the current of the sensor. The current increases back to its initial value when water droplets evaporate from the exposed InN film surface. The response time is as low as 2 s.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.