学位论文详细信息
Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD | |
high-k;AES;XPS;FTIR;low temperature;QMS;ALD | |
Oh, Sang Jeong ; Gregory N. Parsons, Committee Co-Chair,Mehmet C. Ozturk, Committee Member,Nadia Elmasry, Committee Member,Jon Paul Maria, Committee Co-Chair,Oh, Sang Jeong ; Gregory N. Parsons ; Committee Co-Chair ; Mehmet C. Ozturk ; Committee Member ; Nadia Elmasry ; Committee Member ; Jon Paul Maria ; Committee Co-Chair | |
University:North Carolina State University | |
关键词: high-k; AES; XPS; FTIR; low temperature; QMS; ALD; | |
Others : https://repository.lib.ncsu.edu/bitstream/handle/1840.16/3677/etd.pdf?sequence=2&isAllowed=y | |
美国|英语 | |
来源: null | |
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