Spectroscopic Investigation of Hf-Si Oxynitride Alloys and Low Temperature Cobalt Metal ALD

high-k;AES;XPS;FTIR;low temperature;QMS;ALD

Oh, Sang Jeong ; Gregory N. Parsons, Committee Co-Chair,Mehmet C. Ozturk, Committee Member,Nadia Elmasry, Committee Member,Jon Paul Maria, Committee Co-Chair,Oh, Sang Jeong ; Gregory N. Parsons ; Committee Co-Chair ; Mehmet C. Ozturk ; Committee Member ; Nadia Elmasry ; Committee Member ; Jon Paul Maria ; Committee Co-Chair

University:North Carolina State University

关键词: high-k;    AES;    XPS;    FTIR;    low temperature;    QMS;    ALD;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/3677/etd.pdf?sequence=2&isAllowed=y

美国|英语

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