Optimization of Metal Gate Electrode Stacks for Work Function Tuning

work function;high-k;tunung;metal gate;Ru;Ta;Ru-Ta;stack

Lee, JaeHoon ; Doug Barlage, Committee Member,Veena Misra, Committee Chair,Carlton Osburn, Committee Member,Gregory Parsons, Committee Member,Lee, JaeHoon ; Doug Barlage ; Committee Member ; Veena Misra ; Committee Chair ; Carlton Osburn ; Committee Member ; Gregory Parsons ; Committee Member

University:North Carolina State University

关键词: work function;    high-k;    tunung;    metal gate;    Ru;    Ta;    Ru-Ta;    stack;   

Others  :  https://repository.lib.ncsu.edu/bitstream/handle/1840.16/4052/etd.pdf?sequence=1&isAllowed=y

美国|英语

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