Nanostructured single-crystal silicon exhibits a remarkable increase in thegure of merit forthermoelectric energy conversion. Here we theoretically and experimentally(partial) investigate a similar enhancement for polycrystalline silicon structured as an inverse opal. An inverse opal provides nanoscale grains and a thin- lm like geometry to scatter phonons preferentially over electrons. Using solutions to the Boltzmann transport equation for electrons and phonons, we show that thegure of merit at 300 K isfteen times that of bulk single-crystal silicon. Our models predict that grain boundaries are more e ective than surfaces in enhancing the figure of merit. We provide insight into this e ect and show that preserving a grain size smaller than the shell thickness of the inverse opal increases thegure of merit by as much as 50% when the ratio between the two features is a third. At 600 K, thefigure of merit is as high as 0.6 for a shell thickness of 10 nm. We also measured the thermal conductivity of such nanostructures, and a more accurate thermal transport model is provided based on the experimental results.
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Thermoelectric properties of polysilicon inverse opals