For the past few decades, biosensors have been developed at a steady pace and played a crucial role in medical practices and many other biomedical applications. Upon performing a survey of desirable sensor properties such as low cost, high sensitivity, fabrication process, and time to result, a nanograss embedded microfluidic device emerged as a very attractive candidate for an electrochemical impedance spectroscopy (EIS) based biosensor. Such a sensing device is expected to perform direct sensing quickly with high sensitivity, and at low cost. In this work, the nanograss fabrication process is illustrated in detail. Then nanograss substrate itself is characterized by multiple approaches. In addition, COMSOL Multiphysics is used for finite element simulation of the flow through the microfluidic chamber. The EIS method is used to evaluate the capture and sensing ability of the fabricated nanograss embedded microfluidic device. The nanograss devices are shown to be able to capture and sense a few particles/µL, indicating that the nanograss devices could be used as next-generation biosensors.
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Bioparticle capture and sensing utilizing nanograss based microfluidic devices