Al/Al2O3 microchannel plasma chemical reactor for ozone synthesis

Ozone;Micro;channel;Plasma;Alumina;Chemical

Kim, Min Hwan ; Eden ; James G.

关键词: Ozone;    Micro;    channel;    Plasma;    Alumina;    Chemical;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/45561/Min%20Hwan_Kim.pdf?sequence=1&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

Ozone is produced efficiently in arrays of linear microplasmas at low temperatures and generated within alumina (Al2O3) microchannels. The array of microchannels device is fabricated from aluminum foil by chemical processing and mechanical ablation with photolithographic steps. Channels with 3 cm in length and 250 μm in width at the aperture of the channel produce spatially-uniform glow discharges in O2 or dry air feedstock gases at a pressures of 1 atmosphere and flow rates of 0.25 – 2.5 standard liters per minute (slm). Several devices and array structures, including Al/Al2O3 or glass channels, also have been fabricated and tested. Efficiencies and O3 concentrations surpassing 104 g/kWh and 17 g/Nm3, respectively, have been measured, and arrays as large as 24 microchannels have been tested in this thesis. The results presented here suggest a new approach to plasmachemical reactors, one in which “massively parallel” processing of one or more gases in non-streamer glow discharges efficiently produces products of commercial value in thousands of microchannels fabricated in recyclable and inexpensive materials. Reductions of at least an order of magnitude in the weight and volume of microplasma-based O3 reactors, relative to conventional dielectric barrier discharge technology, appear to be feasible.