Silicon microplasma devices as real-time sensors of bulk plasma

microplasma;silicon microcavity device;photodetection

Choi, Dong San ; Eden ; James G.

关键词: microplasma;    silicon microcavity device;    photodetection;   

Others  :  https://www.ideals.illinois.edu/bitstream/handle/2142/72813/Dong%20San_Choi.pdf?sequence=1&isAllowed=y

美国|英语

来源: The Illinois Digital Environment for Access to Learning and Scholarship

【 摘 要 】

Silicon microcavity devices have been demonstrated to exhibit photodetection capabilities. This thesis explores the possibility of using silicon microcavity devices as passive photodetectors for bulk plasma to serve as a diagnostic tool. The voltage-current characteristics of the device show that there is an interesting phenomenon that needs to be replicated with different types of devices to confirm what is occurring during operation. The discussion provides further insight on possible explanations for the voltage-current characteristics.